谢广文   Professor

谢广文，教授，博士，长期从事纳米材料、微晶与非晶态材料研究与应用，在纳米材料表面改性、非晶态催化材料等领域取得了许多创新性成果。近年来在《燃料化学学报》、Chemical Engineering Journal、Carbon、Green Energy & Environment、Journal of Materials Chemistry A、Applied Surface Science、 ACS Applied Materials & Interfaces、Journal of Power Sources、Renewable Energy、Surface and Coatings Technolo...Detials

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沉积电压对辅助加热PCVD-TiN涂层的影响

Release time:2021-03-15  Hits:

  • Key Words:辅助加热式PCVD,TiN涂层;;沉积电压
  • Abstract:研究了不同的沉积电压对辅助加热式PCVD -TiN涂层的影响。实验证明 ,提高沉积电压可以细化TiN涂层的柱状晶结构 ,增加TiN涂层的显微硬度和沉积速率。在试验范围内 ,涂层内残存的氯含量基本不受沉积电压的影响
  • Issue:02
  • Translation or Not:no
Pre One: 基板法铜粒子催化定向生长纳米碳纤维阵列
Next One: 负载型非晶合金催化剂Ni-Co-P/γ-Al_2O_3催化硼氢化钠水解制氢

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