FEM simulation of SAW temperature sensor based on Al/AlN/Si structure
关键字：FEM， Acoustic surface wave devices， SAW temperature sensors
摘要：Finite element method simulation is carried out concerning surface acoustic wave sensor to understand physics of propagation of surface acoustic wave over the substrate and to optimize the design of the device structure. The frequency response to the thickness changes of aluminum nitride piezoelectric thin film, as well to the
environmental temperature variations in the range of 0 °C to 150 °C, are thoroughly investigated. Simulation results show the eigen frequency declines linearly with increasing temperature, indicating the potential application of designed SAW device as a temperature sensor.
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