李莺歌

副教授

副教授 硕士生导师

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所在单位:电子教研室

学历:博士研究生

办公地点:青岛市崂山区松岭路99号 青岛科技大学 自动化与电子工程学院

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Programmed data extraction for frequency-temperature behaviour of AlN based SAW sensors

发布时间:2023-10-19 点击次数:

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摘要:The Aluminum Nitride (AlN) thin film based surface acoustic wave sensors have been fabricated by whole CMOS compatible process. In order to study the resonant frequency behavior responses with temperature, S parameters measured by network analyzer of the AlN SAW sensors are processed with the data extraction program through MATLAB software. It is observed the extracted data of resonance frequency show linear relationship with variation of environment temperatures, which indicates we can easily carry out temperature compensation for the fabricated AlN SAW sensors. And the studied AlN based SAW sensor could also be employed as temperature sensor for further wireless sensing applications. © 2015 IEEE.
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