李莺歌

副教授

副教授 硕士生导师

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所在单位:电子教研室

学历:博士研究生

办公地点:青岛市崂山区松岭路99号 青岛科技大学 自动化与电子工程学院

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MASS SENSITIVITY OF ALUMINUM NITRIDE THIN FILM BASED SURFACE ACOUSTIC WAVE SENSORS PREPARED FOR BIOSENSING APPLICATION

发布时间:2020-12-04 点击次数:

关键字:SAW sensor; AlN thin film; Mass sensitivity; Contact angle; Biosensing
摘要:Aluminum Nitride (AlN) based Surface Acoustic Wave(SAW) sensors have shown great application potentials on serving as biosensors. In this paper, we investigate the mass sensitivity of SAW sensors, which were fabricated based on Si/AlN structure by depositing aluminum oxide (Al2O3) thin films on the active area between the input port and output port of the SAW devices. The material of the IDTs is aluminum. To validate the sample accommodation and protection function of the SiN thin film in bio-liquid detection processes, the contact angle of the SiN surface is also detected. We found that the mass sensitivity of the SAW devices is as high as 1958 MHz/g and the SiN surface is hydrophilic with contact angle of 45 degree. The research results indicate the AlN based SAW devices can be well employed in certain biosensing applications.
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