摘要：Background, Motivation and Objective Aluminum Nitride(AlN) thin film piezoelectric materials based surface acoustic wave resonators have attracted great interests in the sensing applications, especially serving as biosensors. Many studies on microfluidic applications using ZnO based SAW devices have been reported recently. However, ZnO films present potential issues for biomedical and microfluidic applications, making them less ideal materials for microfluidic applications than other thin film piezoelectric materials such as AlN. Therefore in this paper, the mass sensitivity of AIN thin film based SAW sensors is studied for its potential biosensing applications. Statement of Contribution/Methods The mass sensitivity of surface acoustic wave sensors, which are based on Si/Aluminum Nitride(AlN) structure by depositing aluminum oxide(Al_2O_3) thin films on the active area between two Aluminum IDTs, which schematically depicted in Fig.1 & Fig.2, are experimentally investigated.Results Fig.3 is the typical tesing result for Sample 1. From Table 1 and Table 2, the mass sensitivity of the fabricated SAW resonators is calculated to be 2.628 KHz/μg.Discussion and Conclusions 1. The mass sensitivity of the fabricated SAW resonators in this paper is 2.628 KHz/μg, which indicates the SAW devices could be employed in liquid sensing or biosensing applications; 2. The contact angle is 45 degree, indicating the hydrophilic behaviors. Based on the research results in this paper, we prove the feasibility of the fabricated AIN SAW devices for biosensing applications.
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