Key Words:SiC; nanowires with fins; chemical vapor reaction; SEM; TEM
Abstract:SiC nanowires with fins have been prepared by chemical vapor deposition in a vertical vacuum furnace by using a powder mixture of milled Si and SiO2 and gaseous CH4 as the raw materials. The products were characterized by field-emission scanning electron microscopy (FE-SEM), transmission electron microscopy (TEM) and X-ray diffraction (XRD). These investigations confirm that the nanowires with fins are cubic beta-SiC. The diameter of the fins is about 100-120nm and the diameter of the inner core stems is about 60-70nm. The formation process of the beta-SiC nanowires with fins is analyzed and discussed briefly. (c) 2007 Elsevier B.V. All rights reserved.
Volume:39
Issue:2
Translation or Not:no