李莺歌

副教授

副教授 硕士生导师

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所在单位:电子教研室

学历:博士研究生

办公地点:青岛市崂山区松岭路99号 青岛科技大学 自动化与电子工程学院

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FEM simulation of SAW temperature sensor based on Al/AlN/Si structure

发布时间:2023-10-19 点击次数:

关键字:FEM, Acoustic surface wave devices, SAW temperature sensors
摘要:Finite element method simulation is carried out concerning surface acoustic wave sensor to understand physics of propagation of surface acoustic wave over the substrate and to optimize the design of the device structure. The frequency response to the thickness changes of aluminum nitride piezoelectric thin film, as well to the environmental temperature variations in the range of 0 °C to 150 °C, are thoroughly investigated. Simulation results show the eigen frequency declines linearly with increasing temperature, indicating the potential application of designed SAW device as a temperature sensor.
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