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摘要：The Aluminum Nitride (AlN) thin film based surface acoustic wave sensors have been fabricated by whole CMOS compatible process. In order to study the resonant frequency behavior responses with temperature, S parameters measured by network analyzer of the AlN SAW sensors are processed with the data extraction program through MATLAB software. It is observed the extracted data of resonance frequency show linear relationship with variation of environment temperatures, which indicates we can easily carry out temperature compensation for the fabricated AlN SAW sensors. And the studied AlN based SAW sensor could also be employed as temperature sensor for further wireless sensing applications. © 2015 IEEE.
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