Numerical simulation of the chemical vapor deposition of polycrystalline silicon in a trichlorosilane and hydrogen system
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Numerical simulation of the chemical vapor deposition of polycrystalline silicon in a trichlorosilane and hydrogen system
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Laoshan Campus-99 Songling Road, Qingdao City, Shandong Province Sifang Campus-No.53 Zhengzhou Road, Qingdao City, Shandong Province Sino-German International Cooperation Zone (Sino-German Campus)-No. 3698 Tuanjie Road, West Coast New District, Qingdao City, Shandong Province Gaomi Campus-No. 1 Xingtan West Street, Gaomi City, Shandong Province Jinan Campus-No. 80 Wenhua East Road, Jinan City, Shandong Province ©2015 Qingdao University of Science and Technology Administrator email: master@qust.e |
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